What are the components of a vacuum system?

A vacuum system is a complete industrial equipment consisting of a vacuum pump, PLC program control system, gas storage tank, vacuum piping, and other components. It is widely used in fields such as electronic semiconductors, optoelectronic backlight modules, machining, food packaging, and medical laboratories to maintain a stable vacuum environment to support precision manufacturing processes.

 

The system adopts a modular design, integrating pumping speed control, inlet filtration, operation data display, and a remote control interface. During on-site installation, only a power supply and piping connection are required for operation. Fully automated management is achieved through the PLC control system and a touchscreen human-machine interface. It can automatically switch between main and backup pump groups (such as screw pumps and Roots pumps) to ensure a stable vacuum level. It is equipped with automatic shutdown in case of power failure, motor overload and short-circuit protection, and supports a hydrogen recovery system to improve safety and energy efficiency.

 

In the semiconductor industry, vacuum systems provide a vacuum-sealed beam path for EUV lithography, ensuring stable transmission of the extreme ultraviolet light source. They are also used in critical processes such as PECVD coating, vacuum dry etching, and ion implantation, requiring pumping requirements ranging from clean to harsh operating conditions and ultra-low particulate matter standards. In addition, the system can also provide end-to-end vacuum solutions for photovoltaic cell manufacturing, food preservation, medical equipment, and other applications.